Issued Patents All Time
Showing 1–25 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320012 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2025-06-03 |
| 12312696 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2025-05-27 |
| 12227835 | Selective deposition of material comprising silicon and oxygen using plasma | Viraj Madhiwala, Daniele Chiappe, Eva Tois, Charles Dezelah, Shaoren Deng +5 more | 2025-02-18 |
| 12217954 | Method of cleaning a surface | Shaoren Deng, Andrea Illiberi, Daniele Chiappe, Eva Tois, Giuseppe Alessio Verni +8 more | 2025-02-04 |
| 12170197 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2024-12-17 |
| 12148609 | Silicon oxide deposition method | Varun Sharma, Daniele Chiappe, Eva Tois, Viraj Madhiwala, Charles Dezelah +2 more | 2024-11-19 |
| 12138654 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2024-11-12 |
| 12136552 | Toposelective vapor deposition using an inhibitor | Andrea Illiberi, Varun Sharma, Michael Eugene Givens, Shaoren Deng | 2024-11-05 |
| 12134108 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2024-11-05 |
| 12094686 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2024-09-17 |
| 11975357 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +2 more | 2024-05-07 |
| 11898240 | Selective deposition of silicon oxide on dielectric surfaces relative to metal surfaces | Andrea Illiberi, Giuseppe Alessio Verni, Shaoren Deng, Daniele Chiappe, Eva Tois +1 more | 2024-02-13 |
| 11776807 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Lingyun Jia, Viljami Pore, Sun Ja Kim, Oreste Madia | 2023-10-03 |
| 11739427 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2023-08-29 |
| 11739428 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2023-08-29 |
| 11654454 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2023-05-23 |
| 11643726 | Methods for forming a layer comprising a condensing and a curing step | Viljami Pore | 2023-05-09 |
| 11643720 | Selective deposition of silicon oxide on metal surfaces | Andrea Illiberi, Giuseppe Alessio Verni, Shaoren Deng, Daniele Chiappe, Eva Tois +1 more | 2023-05-09 |
| 11640899 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2023-05-02 |
| 11525184 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +1 more | 2022-12-13 |
| 11501965 | Plasma enhanced deposition processes for controlled formation of metal oxide thin films | Lingyun Jia, Viljami Pore, Sun Ja Kim, Oreste Madia, Eva Tois +2 more | 2022-11-15 |
| 11446699 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2022-09-20 |
| 11389824 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2022-07-19 |
| 11230770 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2022-01-25 |
| 11230769 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2022-01-25 |