Issued Patents All Time
Showing 26–50 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +2 more | 2022-01-04 |
| 11183367 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2021-11-23 |
| 11158500 | Plasma enhanced deposition processes for controlled formation of oxygen containing thin films | Lingyun Jia, Viljami Pore, Sun Ja Kim, Oreste Madia | 2021-10-26 |
| 11094535 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2021-08-17 |
| 11056385 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Antti Niskanen | 2021-07-06 |
| 11047040 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +1 more | 2021-06-29 |
| 10814349 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2020-10-27 |
| 10695794 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2020-06-30 |
| 10665425 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2020-05-26 |
| 10662534 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2020-05-26 |
| 10662533 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2020-05-26 |
| 10456808 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +2 more | 2019-10-29 |
| 10443123 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +1 more | 2019-10-15 |
| 10343186 | Vapor phase deposition of organic films | Viljami Pore, Hannu Huotari | 2019-07-09 |
| 10283319 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2019-05-07 |
| 10280519 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2019-05-07 |
| 10273584 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2019-04-30 |
| 10157786 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Antti Niskanen | 2018-12-18 |
| 10049924 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Antti Niskanen | 2018-08-14 |
| 10047435 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +1 more | 2018-08-14 |
| 9895715 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Hannu Huotari +2 more | 2018-02-20 |
| 9679808 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Antti Niskanen | 2017-06-13 |
| 9587307 | Enhanced deposition of noble metals | Suvi Haukka, Antti Rahtu | 2017-03-07 |
| 9520562 | Method of making a resistive random access memory | Qi Xie, Jan Willem Maes, Tom E. Blomberg, Suvi Haukka, Robin Roelofs +1 more | 2016-12-13 |
| 9514956 | Method of growing oxide thin films | Eva Tois, Suvi Haukka | 2016-12-06 |