Issued Patents All Time
Showing 51–75 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502289 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Antti Niskanen | 2016-11-22 |
| 9469899 | Selective deposition of noble metal thin films | Hannu Huotari, Miika Leinikka | 2016-10-18 |
| 9472757 | Method of making a resistive random access memory device | Qi Xie, Jan Willem Maes, Tom E. Blomberg, Suvi Haukka, Robin Roelofs +1 more | 2016-10-18 |
| 9257303 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Antti Niskanen | 2016-02-09 |
| 9112003 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Antti Niskanen | 2015-08-18 |
| 8956971 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Antti Niskanen | 2015-02-17 |
| 8927403 | Selective deposition of noble metal thin films | Hannu Huotari, Miika Leinikka | 2015-01-06 |
| 8592294 | High temperature atomic layer deposition of dielectric oxides | Suvi Haukka, Hannu Huotari | 2013-11-26 |
| 8501275 | Enhanced deposition of noble metals | Suvi Haukka, Antti Rahtu | 2013-08-06 |
| 8309173 | System for controlling the sublimation of reactants | Eric James Shero, Mohith Verghese | 2012-11-13 |
| 8025922 | Enhanced deposition of noble metals | Suvi Haukka, Antti Rahtu | 2011-09-27 |
| 7985669 | Selective deposition of noble metal thin films | Hannu Huotari, Miika Leinikka | 2011-07-26 |
| 7851019 | Method for controlling the sublimation of reactants | Eric James Shero, Mohith Verghese | 2010-12-14 |
| 7824492 | Method of growing oxide thin films | Eva Tois, Suvi Haukka | 2010-11-02 |
| 7771534 | Method of growing oxide thin films | Eva Tois, Suvi Haukka | 2010-08-10 |
| 7771533 | Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide | Eva Tois, Suvi Haukka | 2010-08-10 |
| 7704896 | Atomic layer deposition of thin films on germanium | Suvi Haukka, Antti Rahtu | 2010-04-27 |
| 7666773 | Selective deposition of noble metal thin films | Hannu Huotari, Miika Leinikka | 2010-02-23 |
| 7601225 | System for controlling the sublimation of reactants | Eric James Shero, Mohith Verghese | 2009-10-13 |
| 7476618 | Selective formation of metal layers in an integrated circuit | Olli Kilpela, Wonyong Koh, Hannu Huotari, Miika Leinikka | 2009-01-13 |
| 7045406 | Method of forming an electrode with adjusted work function | Hannu Huotari, Suvi Haukka | 2006-05-16 |
| 7038284 | Methods for making a dielectric stack in an integrated circuit | Suvi Haukka, Jarmo Skarp | 2006-05-02 |
| 6806145 | Low temperature method of forming a gate stack with a high k layer deposited over an interfacial oxide layer | Suvi Haukka, Eric James Shero, Christophe Pomarede, Jan Willem Hub Maes | 2004-10-19 |
| 6794314 | Method of forming ultrathin oxide layer | Ivo Raaijmakers, Yong-Bae Kim, Suvi Haukka | 2004-09-21 |
| 6759325 | Sealing porous structures | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka, Kai-Erik Elers +3 more | 2004-07-06 |