Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12031206 | Methods and systems for forming a layer comprising a transitional metal and a group 13 element | Maart van Druenen, Qi Xie, Charles Dezelah, Petro Deminskyi, Lifu Chen +1 more | 2024-07-09 |
| 11827978 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Bhushan Zope, Shankar Swaminathan, Charles Dezelah, Qi Xie | 2023-11-28 |
| 11286558 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Bhushan Zope, Shankar Swaminathan, Charles Dezelah, Qi Xie | 2022-03-29 |