Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7235806 | Wafer edge with light sensor | David Beginski, Richard Crabb | 2007-06-26 |
| 6950774 | Out-of-pocket detection system using wafer rotation as an indicator | — | 2005-09-27 |
| 6924463 | Pyrometer calibrated wafer temperature estimator | Ivo Raaijmakers | 2005-08-02 |
| 6596973 | Pyrometer calibrated wafer temperature estimator | Ivo Raaijmakers | 2003-07-22 |
| 6373033 | Model-based predictive control of thermal processing | Henk de Waard, Zhimin Lu, Robin M. de Keyser | 2002-04-16 |
| 6207936 | Model-based predictive control of thermal processing | Henk de Waard, Zhimin Lu, Robin M. de Keyser | 2001-03-27 |