Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394659 | Susceptors with film deposition control features | Shujin Huang, Junwei Su, Xing Lin, Alexandros T. Demos, Rutvij Naik +6 more | 2025-08-19 |
| 11885019 | Susceptor with ring to limit backside deposition | Mark Hawkins, Shawn George Thomas | 2024-01-30 |
| 11594444 | Susceptor with sidewall humps for uniform deposition | Thomas Kirschenheiter, Kevin Eugene Quinn | 2023-02-28 |
| 11085112 | Susceptor with ring to limit backside deposition | Mark Hawkins, Shawn George Thomas | 2021-08-10 |
| 10446393 | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures | Nupur Bhargava, John Tolle, Joe Margetis, Robert Vyne | 2019-10-15 |
| 9514927 | Plasma pre-clean module and process | John Tolle, Robert Vyne, Eric Hill | 2016-12-06 |
| 9474163 | Germanium oxide pre-clean module and process | John Tolle | 2016-10-18 |
| 9299557 | Plasma pre-clean module and process | John Tolle, Robert Vyne, Eric Hill | 2016-03-29 |
| 9099423 | Doped semiconductor films and processing | Keith Doran Weeks, John Tolle, Sandeep Mehta | 2015-08-04 |
| 8047706 | Calibration of temperature control system for semiconductor processing chamber | Mark Hawkins, Ravinder Aggarwal, Michael Eugene Givens, Eric Hill, Gregory Bartlett | 2011-11-01 |
| 7655093 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2010-02-02 |
| 7449071 | Wafer holder with peripheral lift ring | Ravinder Aggarwal, Tony Keeton | 2008-11-11 |
| 7070660 | Wafer holder with stiffening rib | Tony Keeton | 2006-07-04 |
| 6893507 | Self-centering wafer support system | Ivo Raaijmakers, Loren Jacobs, Franciscus Bernardus Maria Van Bilsen, Michael J. Meyer, Eric Barrett | 2005-05-17 |
| 6879777 | Localized heating of substrates using optics | Tony Keeton, Ravinder Aggarwal, Mark Hawkins | 2005-04-12 |
| 6840767 | Susceptor pocket profile to improve process performance | — | 2005-01-11 |
| 6776849 | Wafer holder with peripheral lift ring | Ravinder Aggarwal, Tony Keeton | 2004-08-17 |
| 6729875 | Susceptor pocket profile to improve process performance | — | 2004-05-04 |
| 6709267 | Substrate holder with deep annular groove to prevent edge heat loss | Mark Hawkins, Loren Jacobs | 2004-03-23 |
| 6634882 | Susceptor pocket profile to improve process performance | — | 2003-10-21 |
| 6491757 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2002-12-10 |
| 6454865 | Low mass wafer support system | Ivo Raaijmakers, Loren Jacobs, Franciscus Bernardus Maria Van Bilsen, Michael J. Meyer, Eric Barrett | 2002-09-24 |
| 6454866 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2002-09-24 |
| 6343183 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2002-01-29 |
| 6113702 | Wafer support system | Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert +5 more | 2000-09-05 |