Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180611 | Methods of forming silicon carbide coated base substrates at multiple temperatures | Yen Lin Leow, Xinning LUAN, Hui-Chi Chen, Kirk Allen FISHER | 2024-12-31 |
| 12071686 | Liner assemblies for substrate processing systems | Arash Abedijaberi | 2024-08-27 |
| 11885019 | Susceptor with ring to limit backside deposition | Mark Hawkins, Matthew G. Goodman | 2024-01-30 |
| 11827999 | Methods of forming silicon carbide coated base substrates at multiple temperatures | Yen Lin Leow, Xinning LUAN, Hui-Chi Chen, Kirk Allen FISHER | 2023-11-28 |
| 11798835 | Methods for preparing a SOI structure | Charles R. Lottes, Henry F. Erk | 2023-10-24 |
| 11766046 | Cake cutter | — | 2023-09-26 |
| 11699615 | High resistivity semiconductor-on-insulator wafer and a method of manufacture | Igor Peidous, Lu Fei, Jeffrey L. Libbert, Andrew M. Jones, Alex Usenko +2 more | 2023-07-11 |
| 11668006 | Liner assemblies for substrate processing systems | Arash Abedijaberi | 2023-06-06 |
| 11598021 | CVD apparatus | Gang Wang | 2023-03-07 |
| 11594446 | High resistivity SOI wafers and a method of manufacturing thereof | Igor Peidous, Srikanth Kommu, Gang Wang | 2023-02-28 |
| 11345996 | Liner assemblies for substrate processing systems | Arash Abedijaberi | 2022-05-31 |
| 11282739 | Methods for removing an oxide film from a SOI structure and methods for preparing a SOI structure | Charles R. Lottes, Henry F. Erk | 2022-03-22 |
| 11239107 | High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency | Gang Wang, Jeffrey L. Libbert, Qingmin Liu | 2022-02-01 |
| 11139198 | High resistivity semiconductor-on-insulator wafer and a method of manufacturing | Igor Peidous, Lu Fei, Jeffrey L. Libbert, Andrew M. Jones, Alex Usenko +2 more | 2021-10-05 |
| 11085112 | Susceptor with ring to limit backside deposition | Mark Hawkins, Matthew G. Goodman | 2021-08-10 |
| 11081386 | High resistivity SOI wafers and a method of manufacturing thereof | Igor Peidous, Srikanth Kommu, Gang Wang | 2021-08-03 |
| 11015245 | Gas-phase reactor and system having exhaust plenum and components thereof | Eric Hill | 2021-05-25 |
| 10910257 | High resistivity SOI wafers and a method of manufacturing thereof | Igor Peidous, Srikanth Kommu, Gang Wang | 2021-02-02 |
| 10907251 | Liner assemblies for substrate processing systems | Arash Abedijaberi | 2021-02-02 |
| 10832937 | High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency | Gang Wang, Jeffrey L. Libbert, Qingmin Liu | 2020-11-10 |
| 10784146 | Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress | Gang Wang, Jeffrey L. Libbert, Igor Peidous | 2020-09-22 |
| 10741437 | High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency | Gang Wang, Jeffrey L. Libbert, Qingmin Liu | 2020-08-11 |
| 10658227 | Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress | Gang Wang, Jeffrey L. Libbert, Igor Peidous | 2020-05-19 |
| 10546771 | High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency | Gang Wang, Jeffrey L. Libbert, Qingmin Liu | 2020-01-28 |
| 10510583 | Method of manufacturing silicon germanium-on-insulator | Gang Wang | 2019-12-17 |