Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180611 | Methods of forming silicon carbide coated base substrates at multiple temperatures | Xinning LUAN, Hui-Chi Chen, Kirk Allen FISHER, Shawn George Thomas | 2024-12-31 |
| 12057314 | Methods for silicon germanium uniformity control using multiple precursors | Amir Kajbafvala, Peter Westrom, Joe Margetis, Xin Sun, Caleb Miskin +1 more | 2024-08-06 |
| 11827999 | Methods of forming silicon carbide coated base substrates at multiple temperatures | Xinning LUAN, Hui-Chi Chen, Kirk Allen FISHER, Shawn George Thomas | 2023-11-28 |
| 11747209 | System and method for thermally calibrating semiconductor process chambers | Caleb Miskin, Hyeongeu Kim | 2023-09-05 |
| 10732046 | System and method for thermally calibrating semiconductor process chambers | Caleb Miskin, Hyeongeu Kim | 2020-08-04 |