Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8088225 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Mark Hawkins +7 more | 2012-01-03 |
| 7648579 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Mark Hawkins +7 more | 2010-01-19 |
| 7449071 | Wafer holder with peripheral lift ring | Ravinder Aggarwal, Matthew G. Goodman | 2008-11-11 |
| 7070660 | Wafer holder with stiffening rib | Matthew G. Goodman | 2006-07-04 |
| 7033445 | Gridded susceptor | Zachary Lutz | 2006-04-25 |
| 6879777 | Localized heating of substrates using optics | Matthew G. Goodman, Ravinder Aggarwal, Mark Hawkins | 2005-04-12 |
| 6861321 | Method of loading a wafer onto a wafer holder to reduce thermal shock | Michael Stamp, Mark Hawkins | 2005-03-01 |
| 6776849 | Wafer holder with peripheral lift ring | Ravinder Aggarwal, Matthew G. Goodman | 2004-08-17 |