Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7370848 | Bubbler for substrate processing | Frederick J. AmRhein, Arnold J. Dale, Joseph C. Pottebaum, Brian J. Ebert | 2008-05-13 |
| 7077388 | Bubbler for substrate processing | Frederick J. AmRhein, Arnold J. Dale, Joseph C. Pottebaum, Brian J. Ebert | 2006-07-18 |
| 6861321 | Method of loading a wafer onto a wafer holder to reduce thermal shock | Tony Keeton, Mark Hawkins | 2005-03-01 |