Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354791 | Water lift mechanism with electrostatic pickup and method for transferring a workpiece | Ivo Raaijmakers | 2002-03-12 |
| 6254328 | High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock | — | 2001-07-03 |
| 6048154 | High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock | — | 2000-04-11 |
| 5993141 | Independent linear dual-blade robot and method for transferring wafers | — | 1999-11-30 |
| 5810549 | Independent linear dual-blade robot and method for transferring wafers | — | 1998-09-22 |
| 5772773 | Co-axial motorized wafer lift | — | 1998-06-30 |