Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10138551 | Substrate processing apparatuses and systems | Ronald L. Colvin, Jeff Mittendorf, Charles J. Moretti, John W. Rose, Earl Blake Samuels | 2018-11-27 |
| 9175419 | Apparatus for delivering precursor gases to an epitaxial growth substrate | Chantal Arena, Christiaan J. Werkhoven, Ronald Thomas Bertram, JR., Ed Lindow | 2015-11-03 |
| 7018479 | Rotating semiconductor processing apparatus | — | 2006-03-28 |
| 6617247 | Method of processing a semiconductor wafer in a reaction chamber with a rotating component | — | 2003-09-09 |
| 6554905 | Rotating semiconductor processing apparatus | — | 2003-04-29 |
| 6550158 | Substrate handling chamber | Allan Doley, Kenneth O'Neill, Gerben Vrijburg, David Rodriguez, Ravinder Aggarwal | 2003-04-22 |
| 6435799 | Wafer transfer arm stop | Eric Wood, Ivo Raaijmakers | 2002-08-20 |
| 6435809 | Dual arm linear hand-off wafer transfer assembly | Eric Wood, Ivo Raaijmakers | 2002-08-20 |
| 6394440 | Dual orientation leveling platform for semiconductor apparatus | Jack D. Carrell | 2002-05-28 |
| 6331023 | Gridded substrate transport spatula | Gerben Vrijburg | 2001-12-18 |
| 6293749 | Substrate transfer system for semiconductor processing equipment | Ivo Raaijmakers, Loren Jacobs, Michael Halpin, James A. Alexander, Ken O'Neill | 2001-09-25 |
| 6183183 | Dual arm linear hand-off wafer transfer assembly | Eric Wood, Ivo Raaijmakers | 2001-02-06 |
| 6161311 | System and method for reducing particles in epitaxial reactors | Allan Doley, Kenneth O'Neill, Gerben Vrijburg, David Rodriguez | 2000-12-19 |
| 6068441 | Substrate transfer system for semiconductor processing equipment | Ivo Raaijmakers, Loren Jacobs, Mike Halpin, Jim Alexander, Ken O'Neill | 2000-05-30 |
| 5997588 | Semiconductor processing system with gas curtain | Mark Hawkins, Richard Crabb, Allan Doley | 1999-12-07 |
| 5435682 | Chemical vapor desposition system | Richard Crabb, McDonald Robinson, Mark Hawkins, Armand P. Ferro, Wiebe B. deBoer +1 more | 1995-07-25 |
| 5324155 | Wafer handling system with bernoulli pick-up | Richard Crabb, McDonald Robinson, Armand P. Ferro | 1994-06-28 |
| 5156521 | Method for loading a substrate into a GVD apparatus | Richard Crabb, McDonald Robinson, Mark Hawkins, Armand P. Ferro | 1992-10-20 |
| 5092728 | Substrate loading apparatus for a CVD process | Richard Crabb, McDonald Robinson, Mark Hawkins, Armand P. Ferro, Wiebe B. deBoer +1 more | 1992-03-03 |
| 5080549 | Wafer handling system with Bernoulli pick-up | Richard Crabb, McDonald Robinson, Armand P. Ferro | 1992-01-14 |
| 5020475 | Substrate handling and transporting apparatus | Richard Crabb, McDonald Robinson, Mark Hawkins, Armand P. Ferro | 1991-06-04 |
| 4874464 | Process for epitaxial deposition of silicon | Mark Hawkins, Wayne Johnson, Aage Olsen, McDonald Robinson | 1989-10-17 |
| 4828224 | Chemical vapor deposition system | Richard Crabb, McDonald Robinson, Mark Hawkins, Armand P. Ferro, Albert E. Ozias +1 more | 1989-05-09 |
| 4774386 | Spanning device | — | 1988-09-27 |