Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6550158 | Substrate handling chamber | Dennis L. Goodwin, Kenneth O'Neill, Gerben Vrijburg, David Rodriguez, Ravinder Aggarwal | 2003-04-22 |
| 6161311 | System and method for reducing particles in epitaxial reactors | Dennis L. Goodwin, Kenneth O'Neill, Gerben Vrijburg, David Rodriguez | 2000-12-19 |
| 5997588 | Semiconductor processing system with gas curtain | Dennis L. Goodwin, Mark Hawkins, Richard Crabb | 1999-12-07 |