| 5902407 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Wiebe B. deBoer |
1999-05-11 |
| 5657150 |
Electrochromic edge isolation-interconnect system, process, and device for its manufacture |
William R. Kallman, James D. Williams, Leonard M. Dorfman, Christian F. Schaus, Geoffrey A. Russell +2 more |
1997-08-12 |
| 5435682 |
Chemical vapor desposition system |
Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more |
1995-07-25 |
| 5427620 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Wiebe B. deBoer |
1995-06-27 |
| 5374315 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Wiebe B. deBoer |
1994-12-20 |
| 5318634 |
Substrate supporting apparatus |
Wiebe B. deBoer |
1994-06-07 |
| 5261960 |
Reaction chambers for CVD systems |
— |
1993-11-16 |
| 5244694 |
Apparatus for improving the reactant gas flow in a reaction chamber |
— |
1993-09-14 |
| 5198034 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Wiebe B. deBoer |
1993-03-30 |
| 5117769 |
Drive shaft apparatus for a susceptor |
Wiebe B. deBoer |
1992-06-02 |
| 5096534 |
Method for improving the reactant gas flow in a reaction chamber |
— |
1992-03-17 |
| 5092728 |
Substrate loading apparatus for a CVD process |
Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more |
1992-03-03 |
| 5044315 |
Apparatus for improving the reactant gas flow in a reaction chamber |
— |
1991-09-03 |
| 4996942 |
Rotatable substrate supporting susceptor with temperature sensors |
Wiebe B. deBoer |
1991-03-05 |
| 4993355 |
Susceptor with temperature sensing device |
Wiebe B. deBoer |
1991-02-19 |
| 4975561 |
Heating system for substrates |
McDonald Robinson |
1990-12-04 |
| 4846102 |
Reaction chambers for CVD systems |
— |
1989-07-11 |
| 4836138 |
Heating system for reaction chamber of chemical vapor deposition equipment |
McDonald Robinson |
1989-06-06 |
| 4828224 |
Chemical vapor deposition system |
Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more |
1989-05-09 |
| 4821674 |
Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
Wiebe B. deBoer |
1989-04-18 |