Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5902407 | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment | Wiebe B. deBoer | 1999-05-11 |
| 5657150 | Electrochromic edge isolation-interconnect system, process, and device for its manufacture | William R. Kallman, James D. Williams, Leonard M. Dorfman, Christian F. Schaus, Geoffrey A. Russell +2 more | 1997-08-12 |
| 5435682 | Chemical vapor desposition system | Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more | 1995-07-25 |
| 5427620 | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment | Wiebe B. deBoer | 1995-06-27 |
| 5374315 | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment | Wiebe B. deBoer | 1994-12-20 |
| 5318634 | Substrate supporting apparatus | Wiebe B. deBoer | 1994-06-07 |
| 5261960 | Reaction chambers for CVD systems | — | 1993-11-16 |
| 5244694 | Apparatus for improving the reactant gas flow in a reaction chamber | — | 1993-09-14 |
| 5198034 | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment | Wiebe B. deBoer | 1993-03-30 |
| 5117769 | Drive shaft apparatus for a susceptor | Wiebe B. deBoer | 1992-06-02 |
| 5096534 | Method for improving the reactant gas flow in a reaction chamber | — | 1992-03-17 |
| 5092728 | Substrate loading apparatus for a CVD process | Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more | 1992-03-03 |
| 5044315 | Apparatus for improving the reactant gas flow in a reaction chamber | — | 1991-09-03 |
| 4996942 | Rotatable substrate supporting susceptor with temperature sensors | Wiebe B. deBoer | 1991-03-05 |
| 4993355 | Susceptor with temperature sensing device | Wiebe B. deBoer | 1991-02-19 |
| 4975561 | Heating system for substrates | McDonald Robinson | 1990-12-04 |
| 4846102 | Reaction chambers for CVD systems | — | 1989-07-11 |
| 4836138 | Heating system for reaction chamber of chemical vapor deposition equipment | McDonald Robinson | 1989-06-06 |
| 4828224 | Chemical vapor deposition system | Richard Crabb, McDonald Robinson, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro +1 more | 1989-05-09 |
| 4821674 | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment | Wiebe B. deBoer | 1989-04-18 |