Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7232487 | Method for making an epitaxial germanium temperature sensor | Eric H. Silver, Norman W. Madden, Lamonte H. Lawrence | 2007-06-19 |
| 6770504 | Methods and structure for improving wafer bow control | Robert D. Horning, Timothy Louis Scullard | 2004-08-03 |
| 6064081 | Silicon-germanium-carbon compositions and processes thereof | Richard Westhoff, Charles E. Hunt, Li Ling, Ziv Atzmon | 2000-05-16 |
| 5961877 | Wet chemical etchants | Richard Westhoff, Charles E. Hunt, Li Ling | 1999-10-05 |
| 5906708 | Silicon-germanium-carbon compositions in selective etch processes | Richard Westhoff, Charles E. Hunt, Li Ling | 1999-05-25 |
| 5819684 | Gas injection system for reaction chambers in CVD systems | Mark Hawkins | 1998-10-13 |
| 5525157 | Gas injectors for reaction chambers in CVD systems | Mark Hawkins | 1996-06-11 |
| 5458918 | Gas injectors for reaction chambers in CVD systems | Mark Hawkins | 1995-10-17 |
| 5435682 | Chemical vapor desposition system | Richard Crabb, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro, Wiebe B. deBoer +1 more | 1995-07-25 |
| 5411590 | Gas injectors for reaction chambers in CVD systems | Mark Hawkins | 1995-05-02 |
| 5358926 | Epitaxial thin superconducting thallium-based copper oxide layers | William L. Olson, Michael Eddy, Robert B. Hammond, Timothy W. James | 1994-10-25 |
| 5324155 | Wafer handling system with bernoulli pick-up | Dennis L. Goodwin, Richard Crabb, Armand P. Ferro | 1994-06-28 |
| 5221556 | Gas injectors for reaction chambers in CVD systems | Mark Hawkins | 1993-06-22 |
| 5156521 | Method for loading a substrate into a GVD apparatus | Richard Crabb, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro | 1992-10-20 |
| 5092728 | Substrate loading apparatus for a CVD process | Richard Crabb, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro, Wiebe B. deBoer +1 more | 1992-03-03 |
| 5080549 | Wafer handling system with Bernoulli pick-up | Dennis L. Goodwin, Richard Crabb, Armand P. Ferro | 1992-01-14 |
| 5071830 | Metalorganic deposition method for forming epitaxial thallium-based copper oxide superconducting films | William L. Olson, Michael Eddy, Robert B. Hammond, Timothy W. James | 1991-12-10 |
| 5020475 | Substrate handling and transporting apparatus | Richard Crabb, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro | 1991-06-04 |
| 4975561 | Heating system for substrates | Albert E. Ozias | 1990-12-04 |
| 4874464 | Process for epitaxial deposition of silicon | Dennis L. Goodwin, Mark Hawkins, Wayne Johnson, Aage Olsen | 1989-10-17 |
| 4836138 | Heating system for reaction chamber of chemical vapor deposition equipment | Albert E. Ozias | 1989-06-06 |
| 4828224 | Chemical vapor deposition system | Richard Crabb, Mark Hawkins, Dennis L. Goodwin, Armand P. Ferro, Albert E. Ozias +1 more | 1989-05-09 |
| 4798165 | Apparatus for chemical vapor deposition using an axially symmetric gas flow | Wiebe B. deBoer, Klavs F. Jensen, Wayne Johnson, Gary W. Read | 1989-01-17 |
| 4789771 | Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus | Ronald D. Behee, Wiebe B. deBoer, Wayne Johnson | 1988-12-06 |
| 4654509 | Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus | Ronald D. Behee, Wiebe B. deBoer, Wayne Johnson | 1987-03-31 |