Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4789771 | Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus | McDonald Robinson, Wiebe B. deBoer, Wayne Johnson | 1988-12-06 |
| 4654509 | Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus | McDonald Robinson, Wiebe B. deBoer, Wayne Johnson | 1987-03-31 |