Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9218962 | Low temperature epitaxy of a semiconductor alloy including silicon and germanium employing a high order silane precursor | Keith Chung, Hong He, Devendra K. Sadana, Manabu Shinriki | 2015-12-22 |
| 8759200 | Methods and apparatus for selective epitaxy of Si-containing materials and substitutionally doped crystalline Si-containing material | Terry Arthur Francis, Satoshi Hasaka, Robert Torres, Jr., Hong He, Alexander Reznicek +2 more | 2014-06-24 |
| 8642454 | Low temperature selective epitaxy of silicon germanium alloys employing cyclic deposit and etch | Keith Chung, Hong He, Devendra K. Sadana, Manabu Shinriki | 2014-02-04 |
| 8530340 | Epitaxial semiconductor deposition methods and structures | Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Ivo Raaijmakers, Matthias Bauer | 2013-09-10 |
| 8088225 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton +7 more | 2012-01-03 |
| 7901968 | Heteroepitaxial deposition over an oxidized surface | Keith Doran Weeks | 2011-03-08 |
| 7837795 | Low temperature load and bake | Joe P. Italiano, Jianqing Wen | 2010-11-23 |
| 7816236 | Selective deposition of silicon-containing films | Matthias Bauer, Chantal Arena, Ronald Thomas Bertram, JR., Pierre Tomasini, Nyles Wynn Cody +3 more | 2010-10-19 |
| 7682947 | Epitaxial semiconductor deposition methods and structures | Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Ivo Raaijmakers, Matthias Bauer | 2010-03-23 |
| 7648579 | Substrate support system for reduced autodoping and backside deposition | Matt G. Goodman, Jereon Stoutyesdijk, Ravinder Aggarwal, Mike Halpin, Tony Keeton +7 more | 2010-01-19 |
| 7479443 | Germanium deposition | Matthias Bauer, Trevan Landin | 2009-01-20 |
| 7462239 | Low temperature load and bake | Joe P. Italiano, Jianqing Wen | 2008-12-09 |
| 7402504 | Epitaxial semiconductor deposition methods and structures | Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Ivo Raaijmakers, Matthias Bauer | 2008-07-22 |
| 7329593 | Germanium deposition | Matthias Bauer, Trevan Landin | 2008-02-12 |
| 7238595 | Epitaxial semiconductor deposition methods and structures | Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Ivo Raaijmakers, Matthias Bauer | 2007-07-03 |
| 7115521 | Epitaxial semiconductor deposition methods and structures | Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Ivo Raaijmakers, Matthias Bauer | 2006-10-03 |
| 7108748 | Low temperature load and bake | Joe P. Italiano, Jianqing Wen | 2006-09-19 |
| 7029995 | Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy | Michael A. Todd, Keith Doran Weeks, Jianqing Wen | 2006-04-18 |
| 6998305 | Enhanced selectivity for epitaxial deposition | Chantal Arena, Joe P. Italiano | 2006-02-14 |