Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE47170 | Method of forming semiconductor patterns | Hyung Sang Park, Naoki Inoue | 2018-12-18 |
| 9023737 | Method for forming conformal, homogeneous dielectric film by cyclic deposition and heat treatment | Ivo Raaijmakers, Atsuki Fukazawa | 2015-05-05 |
| 8252691 | Method of forming semiconductor patterns | Hyung Sang Park, Naoki Inoue | 2012-08-28 |