Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209942 | Particle sensor | Teuvo Sillanpää, Markku Ylilammi | 2025-01-28 |
| 12212300 | MEMS resonator with high quality factor and its use | Aarne Oja, Antti Jaakkola | 2025-01-28 |
| 12184262 | MEMS resonator | Antti Jaakkola | 2024-12-31 |
| 11913859 | Trapping and releasing particles carried by gas sample | Teuvo Sillanpää, Markku Ylilammi | 2024-02-27 |
| 11799441 | MEMS resonator | Antti Jaakkola | 2023-10-24 |
| 10139313 | Capacitive cylinder pressure sensor | Teuvo Sillanpää, Kai-Erik Elers | 2018-11-27 |