Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12328110 | Microelectromechanical system resonator assembly | Ville SAARELA, Aarne Oja | 2025-06-10 |
| 12323131 | Spring-mass microelectromechanical resonator | Ville SAARELA, Aarne Oja | 2025-06-03 |
| 12212300 | MEMS resonator with high quality factor and its use | Aarne Oja, Panu Koppinen | 2025-01-28 |
| 12184262 | MEMS resonator | Panu Koppinen | 2024-12-31 |
| 12132467 | MEMS resonator array arrangement | Aarne Oja | 2024-10-29 |
| 11799441 | MEMS resonator | Panu Koppinen | 2023-10-24 |
| 11736087 | Coupled MEMS resonator | — | 2023-08-22 |
| 11196402 | Coupled MEMS resonator | — | 2021-12-07 |
| 11190133 | Oven-controlled frequency reference oscillator and method of fabricating thereof | Aarne Oja | 2021-11-30 |
| 10965267 | Micromechanical resonator and method for trimming micromechanical resonator | Tuomas Pensala, Aarne Oja, Panu Pekko, James Dekker | 2021-03-30 |
| 10931255 | Micromechanical resonator | Panu Pekko | 2021-02-23 |
| 10911050 | Frequency reference oscillator device and method of stabilizing a frequency reference signal | Aarne Oja | 2021-02-02 |
| 10056877 | Temperature compensated beam resonator | Panu Pekko, Mika Prunnila, Tuomas Pensala | 2018-08-21 |
| 9991869 | Temperature compensated compound resonator | Panu Pekko, Mika Prunnila, Tuomas Pensala | 2018-06-05 |
| 9837981 | Temperature compensated plate resonator | Panu Pekko, Mika Prunnila, Tuomas Pensala | 2017-12-05 |
| 9559660 | Micromechanical devices comprising n-type doping agents | Tuomas Pensala, Maria Ganchenkova, Mika Prunnila, Jyrki Kiihamäki | 2017-01-31 |
| 9071226 | Micromechanical resonator and method for manufacturing thereof | Tuomas Pensala | 2015-06-30 |
| 8916942 | Microelectromechanical resonator and a method for producing the same | Tuomas Pensala | 2014-12-23 |
| 8786166 | Micromechanical resonator array and method for manufacturing thereof | Tuomas Pensala, Jyrki Kiihamäki | 2014-07-22 |
| 8558643 | Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof | Mika Prunnila, Tuomas Pensala | 2013-10-15 |