Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9559660 | Micromechanical devices comprising n-type doping agents | Tuomas Pensala, Antti Jaakkola, Maria Ganchenkova, Mika Prunnila | 2017-01-31 |
| 9462969 | Microneedle | Feng Gao, Ari Hokkanen, Päivi Heimala | 2016-10-11 |
| 8786166 | Micromechanical resonator array and method for manufacturing thereof | Antti Jaakkola, Tuomas Pensala | 2014-07-22 |
| 8236694 | Method for manufacturing micromechanical components | Hannu Kattelus | 2012-08-07 |
| 7882741 | Method for manufacturing micromechanical components | Hannu Kattelus | 2011-02-08 |
| 6930366 | Method for forming a cavity structure on SOI substrate and cavity structure formed on SOI substrate | — | 2005-08-16 |