Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11548779 | Capacitive micro structure | Tauno Vähä-Heikkilä | 2023-01-10 |
| 11194152 | Electrically tunable fabry-perot interferometer, an intermediate product an electrode arrangement and a method for producing an electrically tunable fabry-perot interferometer | Martti Blomberg, Riikka Puurunen | 2021-12-07 |
| 8236694 | Method for manufacturing micromechanical components | Jyrki Kiihamäki | 2012-08-07 |
| 7882741 | Method for manufacturing micromechanical components | Jyrki Kiihamäki | 2011-02-08 |
| 5644676 | Thermal radiant source with filament encapsulated in protective film | Martti Blomberg, Markku Orpana, Ari Lehto | 1997-07-01 |