Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796887 | Capacitively controlled fabry-perot interferometer | Heikki Saari, Sari Elomaa | 2023-10-24 |
| 11194152 | Electrically tunable fabry-perot interferometer, an intermediate product an electrode arrangement and a method for producing an electrically tunable fabry-perot interferometer | Hannu Kattelus, Riikka Puurunen | 2021-12-07 |
| 10001409 | Infrared emitter having a layered structure | Hannu Kattellus | 2018-06-19 |
| 9733404 | Layered structure for an infrared emitter, infrared emitter device and detector | Hannu Talvitie, Jukka Korhonen | 2017-08-15 |
| 9235043 | Micromechanical tunable Fabry-Perot interferometer, an intermediate product, and a method for producing the same | — | 2016-01-12 |
| 8995044 | Micromechanical tunable Fabry-Perot interferometer and a method for producing the same | — | 2015-03-31 |
| 8654347 | Micromechanical tunable Fabry-Perot interferometer arrangement and a method for producing the same | Jarkko Antila | 2014-02-18 |
| 6931935 | Surface-micromachined absolute pressure sensor and a method for manufacturing thereof | — | 2005-08-23 |
| 6177673 | Optically black surface for producing the same | Altti Torkkeli, Ari Lehto | 2001-01-23 |
| 5827438 | Electrically modulatable thermal radiant source with specific filament | Altti Torkkeli, Stefan Lindblad, Ari Lehto | 1998-10-27 |
| 5818586 | Miniaturized fabry-perot spectrometer for optical analysis | Ari Lehto, Stefan Lindblad, Altti Torkkeli | 1998-10-06 |
| 5646729 | Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer | Yrjo Koskinen, Ari Lehto, Simo Tammela, Markku Orpana, Altti Torkkeli | 1997-07-08 |
| 5644676 | Thermal radiant source with filament encapsulated in protective film | Markku Orpana, Ari Lehto, Hannu Kattelus | 1997-07-01 |
| 5561523 | Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis | Markku Orpana, Ari Lehto | 1996-10-01 |
| 5500569 | Electrically modulatable thermal radiant source and method for manufacturing the same | Markku Orpana, Ari Lehto, Anssi Korhonen | 1996-03-19 |