Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12202725 | Method for bonding wafers, and a wafer | Konsta HANNULA, Marcus Rinkiö, Teemu Vasara | 2025-01-21 |
| 12043542 | MEMS structure including a cap with a via | Antti Iihola | 2024-07-23 |
| 11526000 | Two-axis MEMS mirror with separated drives | Matti LIUKKU, Anssi Blomqvist | 2022-12-13 |
| 10969575 | MEMS reflector with center support | Matti LIUKKU | 2021-04-06 |
| 10914939 | MEMS reflector system | Matti LIUKKU | 2021-02-09 |
| 10377625 | Scanning mirror device and a method for manufacturing it | Tapani Laaksonen | 2019-08-13 |
| 10281718 | Scanning MEMS reflector system | — | 2019-05-07 |
| 9969615 | Manufacturing method of a multi-level micromechanical structure on a single layer of homogenous material | Antti Iihola | 2018-05-15 |
| 9764942 | Multi-level micromechanical structure | Antti Iihola, Ville-Pekka RYTKÖNEN, Matti LIUKKU | 2017-09-19 |
| 9556021 | Method of manufacturing a MEMS structure and use of the method | — | 2017-01-31 |
| 9334160 | Method of manufacturing a MEMS structure | Antti Iihola | 2016-05-10 |
| 8646333 | Vibrating micromechanical sensor of angular velocity | Petri Klemetti, Kaisa Nera, Antti Lipsanen, Anssi Blomqvist | 2014-02-11 |
| 8635909 | Vibrating micromechanical sensor of angular velocity | Petri Klemetti, Kaisa Nera, Antti Lipsanen, Anssi Blomqvist | 2014-01-28 |
| 8279615 | Encapsulation module method for production and use thereof | Bernhard Schmid, Roland Hilser, Heikki Kuisma | 2012-10-02 |
| 8104343 | Vibrating micromechanical sensor of angular velocity | Petri Klemetti, Kaisa Nera, Antti Lipsanen, Anssi Blomqvist | 2012-01-31 |
| 6901804 | Method of manufacturing a membrane sensor | — | 2005-06-07 |
| 6177673 | Optically black surface for producing the same | Martti Blomberg, Ari Lehto | 2001-01-23 |
| 5827438 | Electrically modulatable thermal radiant source with specific filament | Martti Blomberg, Stefan Lindblad, Ari Lehto | 1998-10-27 |
| 5818586 | Miniaturized fabry-perot spectrometer for optical analysis | Ari Lehto, Stefan Lindblad, Martti Blomberg | 1998-10-06 |
| 5646729 | Single-channel gas concentration measurement method and apparatus using a short-resonator Fabry-Perot interferometer | Yrjo Koskinen, Ari Lehto, Simo Tammela, Martti Blomberg, Markku Orpana | 1997-07-08 |