Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12202725 | Method for bonding wafers, and a wafer | Konsta HANNULA, Teemu Vasara, Altti Torkkeli | 2025-01-21 |
| 10284142 | Electrode for a microelectromechanical device | — | 2019-05-07 |
| 9891052 | Micromechanical gyroscope structure | — | 2018-02-13 |
| 9631928 | Gyroscope structure and gyroscope with improved quadrature compensation | Anssi Blomqvist, Jaakko Ruohio | 2017-04-25 |
| 9412934 | Microelectromechanical resonator | Antti Iihola, Ville Kaajakari, Jarmo Kemppainen, Pasi Kivinen, Risto Mourujarvi | 2016-08-09 |