Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11650294 | Fabry-pérot element in lidar device | — | 2023-05-16 |
| 9412934 | Microelectromechanical resonator | Antti Iihola, Ville Kaajakari, Jarmo Kemppainen, Pasi Kivinen, Marcus Rinkiö | 2016-08-09 |
| 7516038 | Method for the mircomechanical measurement of acceleration and a micromechanical acceleration sensor | Tuomo Lehtonen, Teemu Salo, Jens Thurau | 2009-04-07 |