Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685644 | Microelectromechanical device with stopper | Marko Peussa | 2023-06-27 |
| 9412934 | Microelectromechanical resonator | Antti Iihola, Ville Kaajakari, Jarmo Kemppainen, Risto Mourujarvi, Marcus Rinkiö | 2016-08-09 |