Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685644 | Microelectromechanical device with stopper | Pasi Kivinen | 2023-06-27 |
| 11603312 | MEMS element with increased density | — | 2023-03-14 |
| 10468291 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Carl Louis White, Eric James Shero, Darko Babic +2 more | 2019-11-05 |
| 9359672 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Carl Louis White, Eric James Shero, Darko Babic +2 more | 2016-06-07 |
| 8211230 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Carl Louis White, Eric James Shero, Darko Babic +2 more | 2012-07-03 |