Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7377976 | Method for growing thin oxide films | Mikko Ritala, Antti Rahtu, Markku Leskelä | 2008-05-27 |
| 6932867 | Method for growing thin oxide films | Mikko Ritala, Antti Rahtu, Markku Leskelä | 2005-08-23 |
| 6632279 | Method for growing thin oxide films | Mikko Ritala, Antti Rahtu, Markku Leskelä | 2003-10-14 |