Issued Patents All Time
Showing 1–25 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365988 | Atomic layer deposition and etching of transition metal dichalcogenide thin films | Jani Hamalainen, Mikko Ritala | 2025-07-22 |
| 12365981 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Timo Hatanpää, Mikko Ritala | 2025-07-22 |
| 12230506 | Area selective organic material removal | Mikko Ritala, Chao Zhang | 2025-02-18 |
| 12209305 | Deposition of transition metal—comprising material | Miika Mattinen, Timo Hatanpää, Mikko Ritala | 2025-01-28 |
| 12173402 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Timo Hatanpää, Katja Väyrynen, Mikko Ritala | 2024-12-24 |
| 12119220 | Methods for filling a gap feature on a substrate surface and related semiconductor structures | Leo Salmi, Mikko Ritala | 2024-10-15 |
| 12106965 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Katja Väyrynen, Mikko Ritala | 2024-10-01 |
| 11959171 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Timo Hatanpää, Katja Väyrynen, Mikko Ritala | 2024-04-16 |
| 11952658 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Mikko Ritala | 2024-04-09 |
| 11821084 | Atomic layer deposition of rhenium containing thin films | Jani Hamalainen, Mikko Ritala | 2023-11-21 |
| 11814400 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2023-11-14 |
| 11814715 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Anton Vihervaara, Mikko Ritala | 2023-11-14 |
| 11694903 | Area selective organic material removal | Mikko Ritala, Chao Zhang | 2023-07-04 |
| 11667595 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Miika Mattinen, Mikko Ritala | 2023-06-06 |
| 11643728 | Atomic layer deposition and etching of transition metal dichalcogenide thin films | Jani Hamalainen, Mikko Ritala | 2023-05-09 |
| 11624112 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Timo Hatanpää, Mikko Ritala | 2023-04-11 |
| 11555242 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Mikko Ritala, Suvi Haukka | 2023-01-17 |
| 11542600 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2023-01-03 |
| 11527403 | Methods for filling a gap feature on a substrate surface and related semiconductor structures | Leo Salmi, Mikko Ritala | 2022-12-13 |
| 11499227 | Vapor deposition of thin films comprising gold | Maarit Mäkelä, Timo Hatanpää, Mikko Ritala | 2022-11-15 |
| 11499222 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Mikko Ritala | 2022-11-15 |
| 11492703 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Anton Vihervaara, Mikko Ritala | 2022-11-08 |
| 11410851 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Katja Väyrynen, Mikko Ritala | 2022-08-09 |
| 11390946 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Timo Hatanpää, Katja Väyrynen, Mikko Ritala | 2022-07-19 |
| 11244825 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Miika Mattinen, Mikko Ritala | 2022-02-08 |