Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12173402 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2024-12-24 |
| 12106965 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Mikko Ritala, Markku Leskelä | 2024-10-01 |
| 11959171 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2024-04-16 |
| 11952658 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2024-04-09 |
| 11814715 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Timo Hatanpää, Anton Vihervaara, Mikko Ritala, Markku Leskelä | 2023-11-14 |
| 11499222 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2022-11-15 |
| 11492703 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Timo Hatanpää, Anton Vihervaara, Mikko Ritala, Markku Leskelä | 2022-11-08 |
| 11410851 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Mikko Ritala, Markku Leskelä | 2022-08-09 |
| 11390946 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2022-07-19 |
| 10741403 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Mikko Ritala, Markku Leskelä | 2020-08-11 |
| 10731249 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2020-08-04 |
| 10468261 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Mikko Ritala, Markku Leskelä | 2019-11-05 |
| 10468262 | Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures | Mikko Ritala, Markku Leskelä | 2019-11-05 |