Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104250 | Vapor deposition processes | Timo Hatanpää, Mikko Ritala | 2024-10-01 |
| 12065739 | Vapor deposition processes | Timo Hatanpää, Mikko Ritala | 2024-08-20 |
| 11814715 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2023-11-14 |
| 11492703 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2022-11-08 |