Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12365981 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2025-07-22 |
| 11624112 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2023-04-11 |
| 11047042 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2021-06-29 |