Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209305 | Deposition of transition metal—comprising material | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2025-01-28 |
| 11667595 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2023-06-06 |
| 11244825 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Mikko Ritala, Markku Leskelä | 2022-02-08 |
| 11014866 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2021-05-25 |
| 10847366 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Mikko Ritala, Markku Leskelä | 2020-11-24 |
| 10734223 | Method for depositing a metal chalcogenide on a substrate by cyclical deposition | Mikko Ritala, Markku Leskelä | 2020-08-04 |
| 10358407 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2019-07-23 |
| 10319588 | Method for depositing a metal chalcogenide on a substrate by cyclical deposition | Mikko Ritala, Markku Leskelä | 2019-06-11 |