Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155919 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Antti Rahtu | 2021-10-26 |
| 10294563 | ALD of hafnium-containing films using cyclopentadienyl compounds | Sean T. Barry, Antti Rahtu | 2019-05-21 |
| 9850575 | ALD of metal-containing films using cyclopentadienly compounds | Sean T. Barry, Antti Rahtu | 2017-12-26 |
| 9677175 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Antti Rahtu | 2017-06-13 |
| 9670582 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Antti Rahtu | 2017-06-06 |
| 9273391 | ALD of zirconium-containing films using cyclopentadienyl compounds | Sean T. Barry, Antti Rahtu | 2016-03-01 |
| 8795771 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Antti Rahtu | 2014-08-05 |