Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12409473 | Carbene-functionalized composite materials | Cathleen M. Crudden, Eden Ramona Goodwin, Paul Ragogna, Justin Lomax, Yolanda Hedberg +5 more | 2025-09-09 |
| 11155919 | ALD of metal-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2021-10-26 |
| 10801105 | Process for the generation of thin inorganic films | Torben Adermann, Daniel LOEFFLER, Carolin Limburg, Falko Abels, Hagen Wilmer +2 more | 2020-10-13 |
| 10294563 | ALD of hafnium-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2019-05-21 |
| 9850575 | ALD of metal-containing films using cyclopentadienly compounds | Yamile A.M. Wasslen, Antti Rahtu | 2017-12-26 |
| 9677175 | ALD of metal-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2017-06-13 |
| 9670582 | ALD of metal-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2017-06-06 |
| 9453036 | Group 11 mono-metallic precursor compounds and use thereof in metal deposition | Jason P. COYLE, Timothy J. Clark, Jeffrey J.M. Hastie | 2016-09-27 |
| 9273391 | ALD of zirconium-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2016-03-01 |
| 8795771 | ALD of metal-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2014-08-05 |