Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146125 | Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below | Marcel Brill, Yeni Burk, Frank Oliver Heinrich Pirrung, Lothar Alexander Engelbrecht, Szilard Csihony +3 more | 2024-11-19 |
| 11970647 | Composition, its use and a process for selectively etching silicon-germanium material | Francisco Javier Lopez Villanueva, Yeni Burk, Jan Ole Mueller, Marcel Brill, Patrick Wilke +2 more | 2024-04-30 |
| 11685995 | Process for producing flexible organic-inorganic laminates | Maraike Ahlf, Felix Eickemeyer, Stephan Klotz, Juergen Frank, Myung Mo Sung +1 more | 2023-06-27 |
| 11515525 | Process for coating an oxide material | Frank Kleine Jaeger, Tillmann Liebsch, Michael Schoenherr, Dominik GARELLA, Fatih Cetinel +4 more | 2022-11-29 |
| 11180719 | Use of compositions comprising a siloxane-type additive for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below | Mei Chin SHEN, Sheng-Hsuan Wei, Frank Oliver Heinrich Pirrung, Lothar Alexander Engelbrecht, Yeni Burk +3 more | 2021-11-23 |
| 10801105 | Process for the generation of thin inorganic films | Torben Adermann, Carolin Limburg, Falko Abels, Hagen Wilmer, Monica Gill +2 more | 2020-10-13 |
| 10787738 | Process for the generation of thin inorganic films | Falko Abels, Hagen Wilmer, Robert M. Wolf, Christian Roedl, Philipp Bueschelberger | 2020-09-29 |
| 10669297 | Process for the generation of thin inorganic films | Torben Adermann, Hagen Wilmer, Kerstin Schierle-Arndt, Jan Gerkens, Christian Volkmann +1 more | 2020-06-02 |
| 10570514 | Process for the generation of metallic films | Falko Abels, David Dominique Schweinfurth, Karl Matos, Maraike Ahlf, Florian BLASBERG +4 more | 2020-02-25 |
| 10344381 | Process for the generation of thin inorganic films | Julia Strautmann, Rocco Paciello, Thomas Schaub, Felix Eickemeyer, Hagen Wilmer +3 more | 2019-07-09 |
| 10106888 | Process for the generation of thin inorganic films | Julia Strautmann, Rocco Paciello, Thomas Schaub, Kerstin Schierle-Arndt, Hagen Wilmer +3 more | 2018-10-23 |