Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300505 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2025-05-13 |
| 12205820 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma | 2025-01-21 |
| 12170197 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2024-12-17 |
| 12154785 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Raija H. Matero, Eva Tois, Antti Niskanen +2 more | 2024-11-26 |
| 12080548 | Selective deposition using hydrophobic precursors | Elina Färm, Raija H. Matero, Antti Niskanen, Suvi Haukka, Eva Tois | 2024-09-03 |
| 12033849 | Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane | Yuko Kengoyama, Ryu Nakano | 2024-07-09 |
| 12024772 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero +2 more | 2024-07-02 |
| 11728175 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2023-08-15 |
| 11649546 | Organic reactants for atomic layer deposition | Antti Niskanen, Eva Tois, Suvi Haukka | 2023-05-16 |
| 11527400 | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane | Yuko Kengoyama, Ryu Nakano | 2022-12-13 |
| 11430656 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Raija H. Matero, Eva Tois, Antti Niskanen +2 more | 2022-08-30 |
| 11421321 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero +2 more | 2022-08-23 |
| 11387107 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma | 2022-07-12 |
| 11195712 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Viljami Pore, Seiji Okura | 2021-12-07 |
| 11094535 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2021-08-17 |
| 11081342 | Selective deposition using hydrophobic precursors | Elina Färm, Raija H. Matero, Antti Niskanen, Suvi Haukka, Eva Tois | 2021-08-03 |
| 10923361 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2021-02-16 |
| 10854460 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma | 2020-12-01 |
| 10612137 | Organic reactants for atomic layer deposition | Antti Niskanen, Eva Tois, Suvi Haukka | 2020-04-07 |
| 10559458 | Method of forming oxynitride film | Hiroo Sekiguchi, Takashi Yoshida | 2020-02-11 |
| 10546744 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Viljami Pore, Seiji Okura | 2020-01-28 |
| 10460928 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Viljami Pore, Seiji Okura | 2019-10-29 |
| 10453701 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma, Jan Willem Maes +2 more | 2019-10-22 |
| 10373820 | Deposition of organic films | Eva Tois, Viljami Pore, Suvi Haukka, Varun Sharma | 2019-08-06 |
| 10204790 | Methods for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero +2 more | 2019-02-12 |