Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002755 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Viljami Pore, Seiji Okura | 2018-06-19 |
| 9909214 | Method for depositing dielectric film in trenches by PEALD | — | 2018-03-06 |
| 9540729 | Deposition of titanium nanolaminates for use in integrated circuit fabrication | Seiji Okura, Viljami Pore | 2017-01-10 |
| 9523148 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Viljami Pore, Seiji Okura | 2016-12-20 |