Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272047 | Residue measurement from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian | 2025-04-08 |
| 12169925 | System using film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian | 2024-12-17 |
| 12166099 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Petri Raisanen, Michael Eugene Givens | 2024-12-10 |
| 12136574 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2024-11-05 |
| 12090599 | Determination of substrate layer thickness with polishing pad wear compensation | Kun Xu, Benjamin Cherian, Jun Qian | 2024-09-17 |
| 12057354 | Trained neural network in in-situ monitoring during polishing and polishing system | Kun Xu, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2024-08-06 |
| 11908736 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2024-02-20 |
| 11847776 | System using film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian | 2023-12-19 |
| 11836913 | Film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Jun Qian | 2023-12-05 |
| 11791224 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2023-10-17 |
| 11780047 | Determination of substrate layer thickness with polishing pad wear compensation | Kun Xu, Benjamin Cherian, Jun Qian | 2023-10-10 |
| 11695054 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Petri Raisanen, Michael Eugene Givens | 2023-07-04 |
| 11658078 | Using a trained neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian, Jun Qian +1 more | 2023-05-23 |
| 11581220 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2023-02-14 |
| 11295980 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2022-04-05 |
| 11164955 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Petri Raisanen, Michael Eugene Givens | 2021-11-02 |
| 11056344 | Layer forming method | Chiyu Zhu, Qi Xie | 2021-07-06 |
| 10851456 | Deposition of metal borides | Chiyu Zhu, Suvi Haukka | 2020-12-01 |
| 10734497 | Methods for forming a semiconductor device structure and related semiconductor device structures | Chiyu Zhu, Petri Raisanen, Michael Eugene Givens | 2020-08-04 |
| 10607895 | Method for forming a semiconductor device structure comprising a gate fill metal | Qi Xie, Chiyu Zhu, Pauline Calka, Oreste Madia, Jan Willem Maes +1 more | 2020-03-31 |
| 10190213 | Deposition of metal borides | Chiyu Zhu, Suvi Haukka | 2019-01-29 |
| 9679823 | Metric for recognizing correct library spectrum | — | 2017-06-13 |
| 9482610 | Techniques for matching spectra | Boguslaw A. Swedek, Jeffrey Drue David, Harry Q. Lee | 2016-11-01 |