| 12394619 |
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL |
Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more |
2025-08-19 |
| 12387975 |
Thermal process chamber lid with backside pumping |
Anqing Cui, Dien-Yeh Wu, Wei V. Tang, Bo Wang |
2025-08-12 |
| 12374568 |
One chamber multi-station selective metal removal |
Shiyu YUE, Sahil Patel, Yu Lei, Wei Lei, Chih-Hsun Hsu +7 more |
2025-07-29 |
| 12328872 |
Liner for V-NAND word line stack |
Jacqueline S. Wrench, Yong Wu, Wei V. Tang, Srinivas Gandikota, Yongjing Lin +2 more |
2025-06-10 |
| 12288717 |
Metal based hydrogen barrier |
Srinivas Gandikota, Steven C. H. Hung, Srinivas D. Nemani, Susmit Singha Roy, Nikolaos Bekiaris |
2025-04-29 |
| 12230688 |
MOSFET gate engineerinng with dipole films |
Yong Yang, Srinivas Gandikota, Steven C. H. Hung, Mandyam Sriram, Jacqueline S. Wrench |
2025-02-18 |
| 12183798 |
Threshold voltage modulation for gate-all-around FET architecture |
Steven C. H. Hung, Benjamin Colombeau, Myungsun Kim, Srinivas Gandikota, Jacqueline S. Wrench +1 more |
2024-12-31 |
| 12112951 |
Integrated dipole region for transistor |
Srinivas Gandikota, Steven C. H. Hung, Tianyi Huang, Seshadri Ganguli |
2024-10-08 |
| 12114488 |
Enhancing gapfill performance of dram word line |
Yong Yang, Kunal Bhatnagar, Srinivas Gandikota, Seshadri Ganguli, Jose Alexandro Romero +3 more |
2024-10-08 |
| 12104243 |
Methods and apparatus for processing a substrate |
Annamalai Lakshmanan, Jacqueline S. Wrench, Feihu Wang, Joung Joo Lee, Srinivas Gandikota +3 more |
2024-10-01 |
| 12100595 |
Amorphous silicon-based scavenging and sealing EOT |
Yong Yang, Jacqueline S. Wrench, Jianqiu GUO, Seshadri Ganguli, Steven C. H. Hung +1 more |
2024-09-24 |
| 12051734 |
PMOS high-k metal gates |
Srinivas Gandikota, Steven C. H. Hung, Mandyam Sriram, Jacqueline S. Wrench, Yong Yang |
2024-07-30 |
| 12020982 |
Metal based hydrogen barrier |
Srinivas Gandikota, Steven C. H. Hung, Srinivas D. Nemani, Susmit Singha Roy, Nikolaos Bekiaris |
2024-06-25 |
| 12022650 |
Low resistivity DRAM buried word line stack |
Jacqueline S. Wrench, Yong Yang, Srinivas Gandikota, Annamalai Lakshmanan, Joung Joo Lee +2 more |
2024-06-25 |
| 11997849 |
V-NAND stacks with dipole regions |
Yong Yang, Jacqueline S. Wrench, Pradeep Subrahmanyan, Srinivas Gandikota |
2024-05-28 |
| 11996455 |
P-type dipole for P-FET |
Yongjing Lin, Karla M Bernal Ramos, Shih Chung Chen, Lin Dong, Steven C. H. Hung +1 more |
2024-05-28 |
| 11961734 |
Treatments to enhance material structures |
Srinivas Gandikota, Jacqueline S. Wrench, Yong Yang, Steven C. H. Hung |
2024-04-16 |
| 11955332 |
Treatments to enhance material structures |
Srinivas Gandikota, Jacqueline S. Wrench, Yong Yang, Steven C. H. Hung |
2024-04-09 |
| 11932939 |
Lids and lid assembly kits for atomic layer deposition chambers |
Muhammad M. Rasheed, Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Deepak Jadhav +1 more |
2024-03-19 |
| 11907331 |
Method and system for evaluating fractal dimension of particle matter in dispersing system |
Mingliang Xie, Zhihao Jiang |
2024-02-20 |
| 11908914 |
Methods of forming semiconductor structures |
Ria Someshwar, Seshadri Ganguli, Lan Yu, Siddarth A. Krishnan, Srinivas Gandikota +1 more |
2024-02-20 |
| 11894233 |
Electronic device having an oxygen free platinum group metal film |
Wei V. Tang, Seshadri Ganguli, Sang Ho Yu, Feng Q. Liu, Jeffrey W. Anthis +3 more |
2024-02-06 |
| 11888045 |
Integrated dipole flow for transistor |
Yongjing Lin, Karla M Bernal Ramos, Luping Li, Shih Chung Chen, Jacqueline S. Wrench +4 more |
2024-01-30 |
| 11869806 |
Methods of forming molybdenum contacts |
Seshadri Ganguli, Jacqueline S. Wrench, Yong Yang, Srinivas Gandikota |
2024-01-09 |
| 11776980 |
Methods for reflector film growth |
Luping Li, Jacqueline S. Wrench, Wen-Ting Chen, In-Seok Hwang, Shih Chung Chen +1 more |
2023-10-03 |
