Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10170321 | Aluminum content control of TiAIN films | Wenyu Zhang, Wei V. Tang, CHEN-HAN LIN, Yi Xu, Yu Lei +8 more | 2019-01-01 |
| 9748354 | Multi-threshold voltage structures with a lanthanum nitride film and methods of formation thereof | Wei V. Tang, Paul F. Ma, Steven C. H. Hung, Michael P. Chudzik, Siddarth A. Krishnan +6 more | 2017-08-29 |
| 9595466 | Methods for etching via atomic layer deposition (ALD) cycles | Xinyu Fu, Srinivas Gandikota, Mei Chang, Seshadri Ganguli, Guoqiang Jian +2 more | 2017-03-14 |