Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387975 | Thermal process chamber lid with backside pumping | Anqing Cui, Dien-Yeh Wu, Yixiong Yang, Bo Wang | 2025-08-12 |
| 12328872 | Liner for V-NAND word line stack | Jacqueline S. Wrench, Yixiong Yang, Yong Wu, Srinivas Gandikota, Yongjing Lin +2 more | 2025-06-10 |
| 11894233 | Electronic device having an oxygen free platinum group metal film | Yixiong Yang, Seshadri Ganguli, Sang Ho Yu, Feng Q. Liu, Jeffrey W. Anthis +3 more | 2024-02-06 |
| 11732358 | High temperature chemical vapor deposition lid | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota | 2023-08-22 |
| 11715667 | Thermal process chamber lid with backside pumping | Anqing Cui, Dien-Yeh Wu, Yixiong Yang, Bo Wang | 2023-08-01 |
| 11646226 | Method of tuning film properties of metal nitride using plasma | Wenyi Liu, Srinivas Gandikota, Yixiong Yang, Yong Wu, Jianqiu GUO +2 more | 2023-05-09 |
| 11623253 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Arkaprava Dan, Sanjeev Baluja | 2023-04-11 |
| 11488830 | Oxygen free deposition of platinum group metal films | Yixiong Yang, Seshadri Ganguli, Sang Ho Yu, Feng Q. Liu, Jeffrey W. Anthis +3 more | 2022-11-01 |
| 11476267 | Liner for V-NAND word line stack | Jacqueline S. Wrench, Yixiong Yang, Yong Wu, Srinivas Gandikota, Yongjing Lin +2 more | 2022-10-18 |
| 11447866 | High temperature chemical vapor deposition lid | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota | 2022-09-20 |
| 11335591 | Thermal process chamber lid with backside pumping | Anqing Cui, Dien-Yeh Wu, Yixiong Yang, Bo Wang | 2022-05-17 |
| 11260432 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Arkaprava Dan, Sanjeev Baluja | 2022-03-01 |
| 11171047 | Fluorine-doped nitride films for improved high-k reliability | Yixiong Yang, Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Yongjing Lin +2 more | 2021-11-09 |
| 11075276 | Methods and apparatus for n-type metal oxide semiconductor (NMOS) metal gate materials using atomic layer deposition (ALD) processes with metal based precursors | Yongjing Lin, Shih Chung Chen, Naomi Yoshida, Lin Dong, Liqi Wu +5 more | 2021-07-27 |
| 11018009 | Tuning work function of p-metal work function films through vapor deposition | Guoqiang Jian, Chi-Chou Lin, Paul F. Ma, Yixiong Yang, Mei Chang +1 more | 2021-05-25 |
| 10991586 | In-situ tungsten deposition without barrier layer | Yong Wu, Jianqiu GUO, Wenyi Liu, Yixiong Yang, Jacqueline S. Wrench +3 more | 2021-04-27 |
| 10879081 | Methods of reducing or eliminating defects in tungsten film | Guoqiang Jian, Chi-Chou Lin, Paul F. Ma, Kai Wu, Vikash Banthia +4 more | 2020-12-29 |
| 10755947 | Methods of increasing selectivity for selective etch processes | Wenyu Zhang, Yixiong Yang, Mario D. Sanchez, Guoqiang Jian, Paul F. Ma | 2020-08-25 |
| 10665450 | Methods and apparatus for doping engineering and threshold voltage tuning by integrated deposition of titanium nitride and aluminum films | Yixiong Yang, Paul F. Ma, Wenyu Zhang, Shih Chung Chen, CHEN-HAN LIN +6 more | 2020-05-26 |
| 10636705 | High pressure annealing of metal gate structures | Yifei Wang, Kurtis Leschkies, Fei Wang, Xin Liu, Yixiong Yang +2 more | 2020-04-28 |
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed +6 more | 2019-09-10 |
| 10347488 | Titanium compound based hard mask films | Rui Cheng, Pramit Manna, Abhijit Basu Mallick, Srinivas Gandikota | 2019-07-09 |
| 10170321 | Aluminum content control of TiAIN films | Wenyu Zhang, Yixiong Yang, CHEN-HAN LIN, Yi Xu, Yu Lei +8 more | 2019-01-01 |
| 10014185 | Selective etch of metal nitride films | Liqi Wu, Wenyu Zhang, Shih Chung Chen, Leung Kway Lee, Xinming Zhang +1 more | 2018-07-03 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Yu Lei, Vikash Banthia, Kai Wu, Xinyu Fu, Yi Xu +9 more | 2018-04-17 |