Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Muhammad M. Rasheed, Wei V. Tang +6 more | 2019-09-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Muhammad M. Rasheed, Wei V. Tang +6 more | 2019-09-10 |