Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387975 | Thermal process chamber lid with backside pumping | Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang | 2025-08-12 |
| 12054826 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez | 2024-08-06 |
| 11767590 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez | 2023-09-26 |
| 11715667 | Thermal process chamber lid with backside pumping | Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang | 2023-08-01 |
| 11335591 | Thermal process chamber lid with backside pumping | Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang | 2022-05-17 |
| 10407771 | Atomic layer deposition chamber with thermal lid | Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed, Wei V. Tang +6 more | 2019-09-10 |
| 9892941 | Multi-zone resistive heater | Binh Tran, Alexander Tam, Jacob Smith, R. Suryanarayanan Iyer, Joseph Yudovsky +1 more | 2018-02-13 |
| 9312154 | CVD apparatus for improved film thickness non-uniformity and particle performance | Binh Tran, Bernard L. Hwang, Son T. Nguyen, Anh N. Nguyen, Sean M. Seutter +1 more | 2016-04-12 |
| 9202674 | Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements | Olkan Cuvalci, Yu Chang, William Kuang, Seshadri Ganguli | 2015-12-01 |
| 8618446 | Substrate support with substrate heater and symmetric RF return | Yu-Chia Chang, Gwo-Chuan Tzu, William Kuang, Olkan Cuvalci | 2013-12-31 |
| 6617553 | Multi-zone resistive heater | Henry Ho, Xiaoxiong Yuan | 2003-09-09 |