Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Thermal process chamber lid with backside pumping

Thermal process chamber lid with backside pumping

US Patent 12387975 · Granted Aug 12, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Process chamber shower head2025
Transmission of time sensitive signal2025
Self field-suppression CVD tungsten (W) fill on PVD W liner2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL2025
Process chamber manifold2025
One chamber multi-station selective metal removal2025
Liner for V-NAND word line stack2025
Liner for V-NAND word line stack2025
Displays having reduced pixel density region with localized tuning2025
Metal based hydrogen barrier2025
Methods for forming metal gapfill with low resistivity2025
Surface acoustic wave device2025