Process chamber manifold

Assignee

• Applied Materials

Inventors

• Geraldine VASQUEZ (5 patents)
• Shreyas Patil Shanthaveeraswamy (5 patents)
• Mehran Behdjat (39 patents)
• Dien-Yeh Wu (62 patents)
• Jallepally Ravi (32 patents)
• Yu Lei (71 patents)
• Sandesh Yadamane (7 patents)
• Yi Xu (62 patents)
• Manjunatha Koppa (22 patents)

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