Methods for forming metal gapfill with low resistivity

Assignee

• Applied Materials

Inventors

• Yi Xu (62 patents)
• Yu Lei (71 patents)
• Zhimin QI (5 patents)
• Aixi ZHANG (6 patents)
• Xianyuan ZHAO (1 patents)
• Wei Lei (28 patents)
• Xingyao GAO (4 patents)
• Shirish A. PETHE (12 patents)
• Tao Huang (12 patents)
• Xiang-Rui Chang (5 patents)
• Patrick Li (24 patents)
• Geraldine VASQUEZ (5 patents)
• Dien-Yeh Wu (62 patents)
• Rongjun Wang (85 patents)

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