| 11495932 |
Slip ring for use in rotatable substrate support |
Muhannad Mustafa, Yu Chang, Muhammad M. Rasheed, Xiping Huo |
2022-11-08 |
| 10704142 |
Quick disconnect resistance temperature detector assembly for rotating pedestal |
Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Yu Chang, Vinod Konda Purathe +1 more |
2020-07-07 |
| 10407771 |
Atomic layer deposition chamber with thermal lid |
Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed +6 more |
2019-09-10 |
| 9202674 |
Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements |
Olkan Cuvalci, Yu Chang, Anqing Cui, Seshadri Ganguli |
2015-12-01 |
| 8721847 |
Homing of arbitrary scan path of a rotating magnetron |
Yu-Chia Chang, Ronald D. DeDore, Jitendra Ratilal BHIMJIYANI, Wesley W. Zhang |
2014-05-13 |
| 8618446 |
Substrate support with substrate heater and symmetric RF return |
Yu-Chia Chang, Gwo-Chuan Tzu, Anqing Cui, Olkan Cuvalci |
2013-12-31 |
| 8114256 |
Control of arbitrary scan path of a rotating magnetron |
Yu-Chia Chang, Ronald D. DeDore, Jitendra Ratilal BHIMJIYANI, Wesley W. Zhang |
2012-02-14 |
| 7910853 |
Direct real-time monitoring and feedback control of RF plasma output for wafer processing |
David T. Or, Yu-Tzu Chang, Joel M. Huston, Chien-Teh Kao, Mei Chang |
2011-03-22 |
