Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495932 | Slip ring for use in rotatable substrate support | Muhannad Mustafa, Yu Chang, Muhammad M. Rasheed, Xiping Huo | 2022-11-08 |
| 10704142 | Quick disconnect resistance temperature detector assembly for rotating pedestal | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Yu Chang, Vinod Konda Purathe +1 more | 2020-07-07 |
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed +6 more | 2019-09-10 |
| 9202674 | Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements | Olkan Cuvalci, Yu Chang, Anqing Cui, Seshadri Ganguli | 2015-12-01 |
| 8721847 | Homing of arbitrary scan path of a rotating magnetron | Yu-Chia Chang, Ronald D. DeDore, Jitendra Ratilal BHIMJIYANI, Wesley W. Zhang | 2014-05-13 |
| 8618446 | Substrate support with substrate heater and symmetric RF return | Yu-Chia Chang, Gwo-Chuan Tzu, Anqing Cui, Olkan Cuvalci | 2013-12-31 |
| 8114256 | Control of arbitrary scan path of a rotating magnetron | Yu-Chia Chang, Ronald D. DeDore, Jitendra Ratilal BHIMJIYANI, Wesley W. Zhang | 2012-02-14 |
| 7910853 | Direct real-time monitoring and feedback control of RF plasma output for wafer processing | David T. Or, Yu-Tzu Chang, Joel M. Huston, Chien-Teh Kao, Mei Chang | 2011-03-22 |