Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Thermal process chamber lid with backside pumping

Thermal process chamber lid with backside pumping

US Patent 11715667 · Granted Aug 1, 2023

Estimated economic value: $66,604,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Process chamber shower head2025
Transmission of time sensitive signal2025
Self field-suppression CVD tungsten (W) fill on PVD W liner2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL2025
Process chamber manifold2025
Thermal process chamber lid with backside pumping2025
Thermal process chamber lid with backside pumping2025
Thermal process chamber lid with backside pumping2025
Thermal process chamber lid with backside pumping2025
Thermal process chamber lid with backside pumping2025
One chamber multi-station selective metal removal2025
Liner for V-NAND word line stack2025